| 摘要 |
A method and an apparatus for measuring the thickness of a plate-shaped object are provided to measure the thickness of the measured object, with the measured object being absorbed to a stage by vacuum. An apparatus for measuring the thickness of a plate-shaped object(10) measures the thickness of the plate-shaped object with a thickness measuring unit, with the plate-shaped object being positioned on a stage(300). A plurality of absorption holes(301) are formed in the stage to absorb the measured object by vacuum and adhere the measured object to the surface of the stage. A thickness measuring unit(200) measures the thickness of the measured object by comparing a first measurement value measuring a curved height of the surface of the stage with a second measurement value measuring the curve height of the measured object. An X-Y robot(400) moves the thickness measuring unit along the X-Y coordinate axes.
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