发明名称
摘要 PROBLEM TO BE SOLVED: To provide a composition for a metal oxide thin film such that a patterned metal oxide thin film or metal oxide composite thin film having a definite and uniform composition can be easily manufactured and to provide a method for manufacturing the patterned metal oxide thin film or metal oxide composite thin film by using the above composition. SOLUTION: The patterned metal oxide thin film or metal oxide composite thin film is formed by using the composition for a metal oxide thin film prepared by dissolving a metal salt of unsaturated carboxylic acid having at least 9 carbon atoms in a solvent, applying the obtained composition on a substrate, irradiating the composition with light, etching with a solvent and then calcining.
申请公布号 JP3846182(B2) 申请公布日期 2006.11.15
申请号 JP20000367982 申请日期 2000.12.04
申请人 发明人
分类号 G03F7/027;B05D3/02;B05D7/24;C08F2/50;C08F20/64;G03F7/004;G03F7/40;H01L21/027 主分类号 G03F7/027
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