发明名称 |
Apparatus and method for cleaning an electronic device |
摘要 |
An apparatus and method is provided for processing an electronic device, particularly the molding and cleaning of the device. Molding means encapsulate the electronic device with a molding compound. Thereafter, stain from one or more surfaces of the electronic device is removed by a stain removal device adapted to impact the electronic device with a polishing agent. A residue removal system then removes residue from the one or more surfaces of the electronic device. |
申请公布号 |
EP1465241(A3) |
申请公布日期 |
2006.11.15 |
申请号 |
EP20040075898 |
申请日期 |
2004.03.25 |
申请人 |
ASM TECHNOLOGY SINGAPORE PTE LTD. |
发明人 |
HO, SHU CHUEN;KUAH, TENG HOCK;LEE, SHUAI GE;PANG, HUNG KHOON;ZHAO, BAO ZONG |
分类号 |
H01L21/00;H01L21/56;H01L21/68;H01L23/31 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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