发明名称 Apparatus and method for cleaning an electronic device
摘要 An apparatus and method is provided for processing an electronic device, particularly the molding and cleaning of the device. Molding means encapsulate the electronic device with a molding compound. Thereafter, stain from one or more surfaces of the electronic device is removed by a stain removal device adapted to impact the electronic device with a polishing agent. A residue removal system then removes residue from the one or more surfaces of the electronic device.
申请公布号 EP1465241(A3) 申请公布日期 2006.11.15
申请号 EP20040075898 申请日期 2004.03.25
申请人 ASM TECHNOLOGY SINGAPORE PTE LTD. 发明人 HO, SHU CHUEN;KUAH, TENG HOCK;LEE, SHUAI GE;PANG, HUNG KHOON;ZHAO, BAO ZONG
分类号 H01L21/00;H01L21/56;H01L21/68;H01L23/31 主分类号 H01L21/00
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