EQUIPMENT FOR WAFER CLEANING,申请号KR20040082519-传众专利搜索

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发明名称	EQUIPMENT FOR WAFER CLEANING
摘要
申请公布号	KR100646416(B1)	申请公布日期	2006.11.15
申请号	KR20040082519	申请日期	2004.10.15
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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