| 摘要 |
<p>An anti-vibration facility of semiconductor manufacturing equipment is provided to improve a vibration absorbing capability by absorbing completely the vibration. An anti-vibration facility of semiconductor manufacturing equipment includes an anti-vibration unit, a grill girder structure, and an elastic body. The anti-vibration unit(130) is installed at a lower portion of the semiconductor manufacturing equipment. The grill girder structure(160) is used for loading the anti-vibration unit. The elastic body(220) is installed between the anti-vibration unit and the grill girder structure in order to absorb the vibration. The elastic body is made of a rubber material.</p> |
