发明名称 Insulated gate type semiconductor device and method for fabricating same
摘要 An insulated gate type semiconductor device comprised of a semiconductor layer serving as an active region isolated from a semiconductor substrate by a substrate isolation insulating film and a T-shaped gate electrode comprised of a trunk-shaped main gate electrode and a crosspiece-shaped conductor pattern provided on the semiconductor layer, wherein the thickness of the gate insulating film directly under the crosspiece-shaped conductor pattern is made greater than the thickness of the gate insulating film directly under the main gate electrode, whereby it is possible to prevent short-circuits between electrodes, prevent short-circuits between separators, and prevent an increase of the parasitic capacitance.
申请公布号 US7135742(B1) 申请公布日期 2006.11.14
申请号 US20000717143 申请日期 2000.11.22
申请人 FUJITSU LIMITED 发明人 HARADA AKIHIKO;AKIYA SADANORI;FURUYA KAZUHIRO;WATANABE HISASHI
分类号 H01L21/336;H01L27/01;H01L29/423;H01L29/49;H01L29/786 主分类号 H01L21/336
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