DEVICE FOR OPERATING GAS IN VACUUM OR LOW-PRESSURE ENVIRONMENT AND FOR OBSERVATION OF THE OPERATION

摘要

An apparatus for manipulating and observing a gas in a vacuum or low pressure environment is provided to easily control pressure parameters by easily controlling the parameters in a condition in which an electronic microscope is not disassembled. In an apparatus for manipulating and observing a gas in a vacuum or low pressure environment, a gas chamber is formed in the interior of a case by at least one partition plate. At least one absorption chamber(766) is formed outside the gas chamber. Inner holes are formed on upper and lower partition plates of the gas chamber. Outer holes are formed on the upper and lower surfaces of the case. The inner holes and the outer holes are arranged on the same axis and are disposed in a flat portion. A gas discharge hole communicated with the absorption chamber and a gas injection hole communicated with the gas chamber are formed in the case.