发明名称 |
Broad band DUV, VUV long-working distance catadioptric imaging system |
摘要 |
A high performance objective having very small central obscuration, an external pupil for apertureing and Fourier filtering, loose manufacturing tolerances, large numerical aperture, long working distance, and a large field of view is presented. The objective is preferably telecentric. The design is ideally suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths in the UV to VUV spectral range.
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申请公布号 |
US7136234(B2) |
申请公布日期 |
2006.11.14 |
申请号 |
US20050033218 |
申请日期 |
2005.01.10 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORPORATION |
发明人 |
SHAFER DAVID R.;CHUANG YUNG-HO |
分类号 |
G02B21/10;G02B13/14;G02B13/22;G02B17/00;G02B17/08;G02B21/12 |
主分类号 |
G02B21/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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