发明名称 |
Thickness measuring systems and methods using a cavity resonator |
摘要 |
Film thickness measurement systems and methods are provided that utilize a signal generator having a Gunnplexer design and a resonant frequency detector to correlate the shift in resonant frequency experienced by a resonant cavity having one face abutting a test object. The shift is resonant frequency is determinative of a linear or near linear correlation between film thickness and the resonant frequency shift.
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申请公布号 |
US7135869(B2) |
申请公布日期 |
2006.11.14 |
申请号 |
US20040759246 |
申请日期 |
2004.01.20 |
申请人 |
THE BOEING COMPANY |
发明人 |
SERGOYAN EDWARD G.;CHAMPION CORBIN;OLSEN ROBERT G. |
分类号 |
G01R27/04;G01B15/02;G01N22/00;G01R27/26 |
主分类号 |
G01R27/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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