发明名称 Method and system for producing signals to test semiconductor devices
摘要 A method of and system for producing signals to test semiconductor devices includes a pin electronic (PE) stage for providing a parametric measurement unit (PMU) current test signal to a semiconductor device under test. The PE stage also senses a response from the semiconductor device under test.
申请公布号 US7135881(B2) 申请公布日期 2006.11.14
申请号 US20040018626 申请日期 2004.12.21
申请人 TERADYNE, INC. 发明人 WALKER ERNEST;SARTSCHEV RONALD A.
分类号 G01R31/26 主分类号 G01R31/26
代理机构 代理人
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