发明名称 Apparatus and method for calibration of mass flow controller
摘要 A mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator. The variable-flow fluid source supplies gas at varying rates to the mass flow sensor being calibrated and at proportional rates to a receptacle of known volume. A pressure differentiator computes the time derivative of gas flow into the receptacle of known volume and, from that, the actual flow into the receptacle. Given the actual flow, the proportionate flow into the mass flow sensor may be determined and the flow signal from the mass flow sensor correlated to the actual flow.
申请公布号 US7136767(B2) 申请公布日期 2006.11.14
申请号 US20020178119 申请日期 2002.06.24
申请人 MKS INSTRUMENTS, INC. 发明人 SHAJII ALI;KOTTENSTETTE NICHOLAS;AMBROSINA JESSE
分类号 G01F25/00;G01F1/66;G01F1/684;G01F1/696;G01F1/86;G01F5/00 主分类号 G01F25/00
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