| 摘要 |
<p>A pellicle is provided to reduce the contamination by using an improved mask adhesive made of an acryl based emulsion adhesive. A pellicle includes a frame, a pellicle layer, and a mask adhesive layer. The pellicle layer is formed on one end portion of the frame via a film adhesive. The mask adhesive layer is formed on the other end portion of the frame in order to attach the pellicle itself to a predetermined mask. The pellicle is attached to a quartz glass. Then, the pellicle is removed from the quartz glass. At this time, the mask adhesive layer of the pellicle remains within 5% of the quartz glass area. The mask adhesive layer is made of an acryl based emulsion adhesive.</p> |
