发明名称 |
System and method for setting and compensating errors in AOI and POI of a beam of EM radiation |
摘要 |
System and methodology for setting, and compensating detected errors between intended and realized Angle-of-Incidence (AOI) and Plane-Of-Incidence (POI) settings in ellipsometer and the like systems during analysis of sample characterizing data.
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申请公布号 |
US7136172(B1) |
申请公布日期 |
2006.11.14 |
申请号 |
US20040858795 |
申请日期 |
2004.06.02 |
申请人 |
J.A. WOOLLAM CO., INC. |
发明人 |
JOHS BLAINE D.;GOEDEN CHRISTOPHER A.;PFEIFFER GALEN L.;LIPHARDT MARTIN M. |
分类号 |
G01B11/14;G01B11/24 |
主分类号 |
G01B11/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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