发明名称 |
Generation and use of integrated circuit profile-based simulation information |
摘要 |
An exemplary method and system for generating integrated circuit (IC) simulation information regarding the effect of design and fabrication process decisionn includes creating and using a data store of profile-based information comprising metrology signal, structure profile data, process control parameters, and IC simulation attributes. An exemplary method and system for generating a simulation data store using signals off test gratings that model the effect of an IC design and/or fabrication process includes creating and using a simulation data store generated using test gratings that model the geometries of the IC interconnects. The interconnect simulation data store may be used in-line for monitoring electrical and thermal properties of an IC device during fabrication. Other embodiments include utilizing a metrology simulator and various combinations of a fabrication process simulator, a device simulator, and/or circuit simulator.
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申请公布号 |
US7136796(B2) |
申请公布日期 |
2006.11.14 |
申请号 |
US20020087069 |
申请日期 |
2002.02.28 |
申请人 |
TIMBRE TECHNOLOGIES, INC. |
发明人 |
JAKATDAR NICKHIL;NIU XINHUI;BAO JUNWEI |
分类号 |
G06G7/62;H01L21/66;G06F17/50;G06F19/00;H01L21/00 |
主分类号 |
G06G7/62 |
代理机构 |
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地址 |
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