| 摘要 |
A method, system and computer readable medium for controlling a process performed by a semiconductor processing tool (102) includes inputting data (104) relating to a process performed by the semiconductor processing tool (102), and inputting a first principles physical model (106) relating to the semiconductor processing tool (102). First principles simulation (108) is then performed using the input data (104) and the physical model (106) to provide a first principles simulation result, and the first principles simulation result is used to control the process performed by the semiconductor processing tool (102).
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