| 摘要 |
A ceramic heater is provided to accelerate a heating speed of the ceramic heater by reducing a resistance variation due to variation in a temperature of the resistive heating element. A ceramic heater includes alumina substrates(10,12) and a resistive heating element(20). The alumina substrate is made of alumina 90-96w%, talc 2-5w%, silica 1-3w%, CaCO3 0.5-1w%, and Y2O3 0.5-1w%. The resistive heating element contains tungsten, a mixture of tungsten and molybdenum, or a mixture of tungsten, molybdenum, and ZrO2. The mixture of tungsten and molybdenum contains tungsten 10-30w% and molybdenum 70-90w%. The mixture of tungsten, molybdenum, and ZrO2 contains tungsten 30-50w%, molybdenum 50-70w%, and predetermined amount of ZrO2. |
