发明名称 Image sensor and method of manufacturing the same
摘要 On a transparent electrically insulating substrate, formed are a scanning line, and a gate electrode of a switching element, further formed are a gate insulating film, a semiconductor layer, an n<SUP>+</SUP>-Si layer to be formed into a source electrode and a drain electrode. After the patterning of the foregoing structure, the dielectric film is formed, and the portion corresponding to the contact hole is removed by etching, and photosensitive resin is applied to form the interlayer insulating film. Then, the transparent electrode is extended from the pixel electrode over the switching element, whereon a conversion layer and a gold layer for use in electrode are vapor-deposited. In this structure, an increase in capacitor between the pixel electrode and the signal line can be suppressed by the interlayer insulating film, and the transparent electrode functions as a top gate and release excessive electric charge. As a result, excessive electric charge can be released effectively in the double gate structure while suppressing an increase in capacitor between the pixel electrode and the signal line.
申请公布号 US7135706(B2) 申请公布日期 2006.11.14
申请号 US20040003343 申请日期 2004.12.06
申请人 SHARP KABUSHIKI KAISHA 发明人 NAGATA HISASHI;IZUMI YOSHIHIRO
分类号 H01L29/04;H01L27/12;H01L27/146;H01L29/417;H01L29/786 主分类号 H01L29/04
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