发明名称 Production device control management system
摘要 <p>A management control system of a production device (3) producing a product according to a type parameter. The system includes a judge circuit (5) for extracting error information (b) from operation information (a) on the production device (3) and an error suppression circuit (6) for extracting parameter information (d) for evading an error corresponding to the error information (b) extracted and variably controlling the type parameter of the production device (3). From a product recipe database section (11) storing various data on the various work products produced in the production device (3) and the data for evading an error, data corresponding to the work product produced in the production device (3) is searched by a product search engine section (12) so as to set-up the production device (3).</p>
申请公布号 KR100643595(B1) 申请公布日期 2006.11.13
申请号 KR20057025050 申请日期 2005.12.27
申请人 发明人
分类号 H01L21/52;G05B19/418;H01L21/02;H05K13/08 主分类号 H01L21/52
代理机构 代理人
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