Plasma Processing Apparatus,申请号KR20010078446-传众专利搜索

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发明名称	Plasma Processing Apparatus
摘要
申请公布号	KR100643104(B1)	申请公布日期	2006.11.10
申请号	KR20010078446	申请日期	2001.12.12
申请人		发明人
分类号	H05H1/46;B23K10/00;C23C16/511;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H05H1/30	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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