COMPOSANT MICROMECANIQUE ET PROCEDE DE REALISATION D'UNE COUCHE ANTI-ADHERENTE SUR UN COMPOSANT MICROMECANIQUE

摘要

In micromechanical component (2) with anti-stick film(s) (3) containing fluorosilane(s) on at least part of its surface (4) for reducing surface adhesive power, the anti-stick film is a multilayer film to increase the mechanical and thermal stability, comprising film(s) (7,8) of metal oxide (I) and film(s) (5, 6) of fluorosilane(s) (II). Independent claims are also included for the following: 2 methods of producing an anti-stick film (3) on a component (2), especially the micromechanical component, in a chamber by either: (i). evacuating the chamber, admitting a gaseous (I) precursor to produce a (I) film (7, 8) on the component, evacuating the chamber and admitting gaseous (II) to produce a (II) film (5, 6) on the (I) film; or (ii). purging the chamber with dry inert carrier gas (III), passing (III) through liquid (I) precursor and enriching (III) with (I) precursor, treating the component with this gas, purging the chamber with dry (III), passing (III) through (II) and enriching (III) with (II) and treating the part with (III) enriched in (II); and (iii) plant used for coating component(s) (2), especially the micromechanical component, with an anti-stick film (3) of (I) layer(s) (7, 8) and (II) layer(s) (5, 6), which has chamber(s), preferably with heating and cooling equipment, and several reservoirs for supplying fluid (II), water and (I) precursor(s).