| 摘要 |
An aperture assembly of a scanning electron microscope is provided to increase the number of apertures and simplify an aligning process by using a circular aperture plate. An aperture assembly of a scanning electron microscope includes a body, a circular aperture plate(120), and a plate rotating unit(130). The body includes a guide part(111) which is moved to an X-axis direction and a Y-axis direction by operating an X-axis control knob and a Y-axis control knob. The circular aperture plate is installed at the guide part of the body in order to be positioned on an electron beam path. A plurality of apertures(121) for focusing electron beams are formed along an edge of the circular aperture plate. The plate rotating unit rotates the circular aperture plate.
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