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发明名称
Polymer resin and composition for organic anti-reflective coating, and method of pattern formation using the same
摘要
申请公布号
KR100643918(B1)
申请公布日期
2006.11.10
申请号
KR20040109196
申请日期
2004.12.21
申请人
发明人
分类号
G03F7/11
主分类号
G03F7/11
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