| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polymer capable of forming an anti-reflective coating or a light absorption coating having an excellent storage stability and step-coverage property that does not allow an acid formed by irradiation of light to diffuse into a coating such as the anti-reflective coating, nor allows the intermixing of a resist and a coating such as the anti-reflective coating. <P>SOLUTION: The polymer is represented by general formula II (wherein R is a hydrogen atom or an alkyl group; R<SB>1</SB>is an alkylene group, a substituted alkylene group, a cycloalkylene group, a substituted cycloalkylene group, a phenylene group, or a substituted phenylene group; R<SB>2</SB>is a phenyl group, -COOH, a halogen atom, a cyano group, an alkoxy group, or -COOR<SB>6</SB>in which R<SB>6</SB>is a substituted or a non-substituted alkyl or aryl or ethylacetoacetate group: R<SB>3</SB>is -COOD; D is an organic chromophore which absorbs the exposure wavelength(100 to 450 nm) and represents a substituted or non-substituted benzene ring, a condensed ring or a heterocyclic ring bonded directly or through an alkylene group; X is O or S; Y is O or a NR<SB>4</SB>group in which R<SB>4</SB>is a hydrogen atom or a substituted or non substituted phenyl group or cyclic, linear or branched alkyl group; Z is O, a ND group, or a NR<SB>5</SB>group in which R<SB>5</SB>is a hydrogen atom or a substituted or non-substituted phenyl group or a cyclic, linear or branched alkyl group; and n, p and q are integers including zero, and m and n are integers including zero of which at least one is greater than zero). <P>COPYRIGHT: (C)2007,JPO&INPIT |
