| 摘要 |
PROBLEM TO BE SOLVED: To provide a transferring device, in which the positional discrepancy (the lateral discrepancy) between a mold and a piece to be molded can be checked small when a minute indented pattern molded on the surface of the mold by lithographic technique is transferred to the surface of the piece to be molded, and its method. SOLUTION: This transferring device is equipped with a table 11, on the top surface of which a molding base material to be supplied with a molding material is installed, a mold holding body 205 having a transferring mold 41 arranged opposite to the surface of the table fixedly held on the under surface thereof, a lower part gimbal member 201, which holds the mold holding body on its under surface and, at the same time, a convexly spherical surface part is molded on its top surface side, an upper part gimbal member 203, in which a concavely spherical surface part counter-contacting with the convexly spherical surface of the lower part gimbal member, a movable body 19, which holds the upper part gimbal member 203 and is vertically movable to the surface of the table, a movable body driving means including a servomotor 33 for vertically movingly driving the movable body and an attitude adjusting and holding means for adjusting and holding the attitude of the lower part gimbal member. COPYRIGHT: (C)2007,JPO&INPIT |
