| 摘要 |
PROBLEM TO BE SOLVED: To achieve automatic focus excellent in accuracy with a device constitution at relatively low cost, and to shorten tact time. SOLUTION: This automatic visual inspection device automatically inspects appearance of a pattern D formed on an object workpiece K. The automatic visual inspection device comprises an imaging optical unit 5 having switch arrangement mechanisms 53 and 54 that selectively switch between an inspection stage 2 for holding the object workpiece and a displacement sensor 12 for measuring the displacement LS between an objective lens 11 for obtaining an expanded image of a pattern and the object workpiece at the same position P0 and arrange them. The automatic visual inspection device also comprises a storage means 81 for previously storing the optimum focus displacement of the objective lens 11 at a reference position PB in the object workpiece K as a reference displacement LB, and a Z-directional driving means 6 for relatively moving the inspection stage and the imaging optical unit in the Z direction so that the displacement LT between the objective lens and the object workpiece becomes the reference displacement based on the displacement to the object workpiece measured by the displacement sensor and the reference displacement. COPYRIGHT: (C)2007,JPO&INPIT |
