| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric actuator which can easily form a plurality of piezoelectric devices arranged in higher density, and the piezoelectric actuator. <P>SOLUTION: A groove 37 is formed around a device layout area 36 of a support plate 35. A plurality of piezoelectric devices 31 are arranged in the device layout area 36. Thereafter, by depositing particles of a piezoelectric material on the support plate 35, more particles of the piezoelectric material than those in an area where the groove 37 are deposited in the device layout area 36 is formed, and the plurality of piezoelectric devices 31 are formed in the device layout area 36. <P>COPYRIGHT: (C)2007,JPO&INPIT |
