发明名称 |
METHOD FOR MANUFACTURING MICROLENS ARRAY, PHOTOSENSITIVE RESIN COMPOSITION FOR MICROLENS ARRAY AND PHOTOSENSITIVE ELEMENT FOR MICROLENS ARRAY |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a microlens array by which a microlens array having sufficiently excellent optical performance can be manufactured at a lower cost. <P>SOLUTION: The method for manufacturing a microlens array includes: (I) a photosensitive layer forming step of forming a photosensitive layer 20 comprising a photosensitive resin composition on a transparent substrate 10; (II) a curing step of curing a predetermined portion of the photosensitive layer by passing specific active light through a sheet 40 having light scattering power disposed above the photosensitive layer to generate scattered light D, and by exposing the predetermined portion to the scattered light through a photomask 30 having a predetermined pattern disposed between the photosensitive layer and the sheet; and (III) a developing step of removing the uncured portion of the photosensitive layer by development. <P>COPYRIGHT: (C)2007,JPO&INPIT |
申请公布号 |
JP2006308960(A) |
申请公布日期 |
2006.11.09 |
申请号 |
JP20050132960 |
申请日期 |
2005.04.28 |
申请人 |
HITACHI CHEM CO LTD |
发明人 |
MUKAI IKUO;NOJIRI TAKESHI;YOSHIDA TAKESHI |
分类号 |
G02B3/00;G03F7/004;G03F7/20 |
主分类号 |
G02B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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