| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable failure substrates to be used for learning, and to significantly improve the operability of a defect detector. <P>SOLUTION: An image of the substrate imaged by a CCD camera 6 is sent to a personal computer 5, and a part of a defect is analyzed by a CPU 2 in the personal computer 5 and is displayed on a monitor 1. Although the displayed image of the defect accidentally includes a part, having no defect because the learning is not completed, operator needs only to enclose the part of the actual defect with a mouse 4, and information on the defective part is provided to the CPU 2. Based on the information, the CPU 4 removes the defective part and learns only the non-defective part. Thus, learning with the defective substrate can be made. <P>COPYRIGHT: (C)2007,JPO&INPIT |
