| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing head with a simple structure which immediately copes with the change of a set vale of a pressure distribution. <P>SOLUTION: A plurality of through-holes 32a-32c are provided in the face of a backing film 32 with a prescribed pattern. Fluid passages respectively made to correspond to each of the through-holes 32a-32c are provided to a body of the polishing head. The polishing head is provided with rotating rings 316-318 and motors M1-M3 for rotating each rotating ring 316-318 as a passage opening/closing mechanism for opening/closing each fluid passage. Each rotating ring 316-318 has through-holes 316a-318c respectively made to correspond to each of the through-holes 32a-32c of the backing film 32. <P>COPYRIGHT: (C)2007,JPO&INPIT |
