发明名称 TERAHERTZ MEASURING DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To measure the transmission and reflection of a specimen efficiently. <P>SOLUTION: A terahertz measuring device comprises optical illumination systems 11, 21, 41, 22, 25, 42 for irradiating the specimen 50 with terahertz light; and detection optical systems 23, 24, 12, 43, 26, 27, 13 for detecting the transmitted and reflected light of the terahertz light generated from the specimen simultaneously. The transmission and reflection can be measured by the measuring device without switching optical paths. Thus, both of the transmitted and reflected light from the specimen 50 can be utilized effectively without waste. Also, even if the state of the specimen 50 changes, transmission measurement data and reflection measurement data can be acquired in the same state. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2006308426(A) 申请公布日期 2006.11.09
申请号 JP20050131493 申请日期 2005.04.28
申请人 TOCHIGI NIKON CORP;NIKON CORP 发明人 TANAKA YOJI;AKAHORI HIROMICHI
分类号 G01N21/35;G01N21/3586 主分类号 G01N21/35
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