TREATMENT OF SUBSTRATE BY PRODUCING AND CONTROLLING CRYOGENIC AEROSOL

摘要

PROBLEM TO BE SOLVED: To provide a method of treating a substrate by producing and controlling a cryogenic aerosol. SOLUTION: A method of treating a substrate is to impinge the substrate disposed in a chamber with a cryogenic aerosol spray. The cryogenic aerosol spray is formed by injecting a liquid or liquid/gaseous stream of one or more cryogens at a first pressure through a nozzle into a chamber maintained at a second pressure which is lower than the first pressure, so as to form a cryogenic aerosol spray having solid aerosol particles downstream from the nozzle. The liquid or liquid/gaseous stream thus injected forms a spray containing liquid particles having gas bubbles in their inside, and since the second pressure is 1.6×104Pascal or less, the liquid particles are effervescently flashed by the growth of the bubbles inside the liquid particles of the spray, and in forming the solid aerosol particles, the gas bubbles break up the liquid particles to form the solid aerosol particles having a decreased particle size. COPYRIGHT: (C)2007,JPO&INPIT