发明名称 |
SEMICONDUCTOR APPARATUS AND ITS MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor apparatus and its manufacturing method which does not require an ion injection for a threshold value adjustment corresponding to each individual in a low voltage driven transistor with a different threshold value to form the same conductive type channel. SOLUTION: A low voltage driven n-channel transistor LV-N-LVt of a low threshold value type is formed directly on a p-type silicon substrate 1 without forming a well, and a process is reduced by integrating the ion injection process for the threshold value adjustment with the ion injection process for the threshold value adjustment of other transistor. COPYRIGHT: (C)2007,JPO&INPIT
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申请公布号 |
JP2006310602(A) |
申请公布日期 |
2006.11.09 |
申请号 |
JP20050132163 |
申请日期 |
2005.04.28 |
申请人 |
TOSHIBA CORP |
发明人 |
KAJIMOTO SANETOSHI;NOGUCHI MITSUHIRO |
分类号 |
H01L27/088;H01L21/28;H01L21/768;H01L21/8234 |
主分类号 |
H01L27/088 |
代理机构 |
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