发明名称 SEMICONDUCTOR APPARATUS AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor apparatus and its manufacturing method which does not require an ion injection for a threshold value adjustment corresponding to each individual in a low voltage driven transistor with a different threshold value to form the same conductive type channel. SOLUTION: A low voltage driven n-channel transistor LV-N-LVt of a low threshold value type is formed directly on a p-type silicon substrate 1 without forming a well, and a process is reduced by integrating the ion injection process for the threshold value adjustment with the ion injection process for the threshold value adjustment of other transistor. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006310602(A) 申请公布日期 2006.11.09
申请号 JP20050132163 申请日期 2005.04.28
申请人 TOSHIBA CORP 发明人 KAJIMOTO SANETOSHI;NOGUCHI MITSUHIRO
分类号 H01L27/088;H01L21/28;H01L21/768;H01L21/8234 主分类号 H01L27/088
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