| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method of color filter, in which the spectral transmittance of a colored pixel of a CCD is regarded to be measured correctly even when the spectral transmittance of the colored pattern of a dummy is measured. SOLUTION: The inspection method comprises: (1) on the monitor glass substrate, each color pattern for light shielding pattern SP-R, SP-G, or SP-B provided with the same shape, same size and a plurality of arranged openings for each color is formed; (2) the measured value 1R, 1G, and 1B are obtained by measuring the spectral transmittance of the certain area; (3) when the colored pixel is formed on the Si substrate, each colored pattern CP-R, CP-G, or CP-B of each color is formed on the opening of each color; (4) each measured value 2R, 2G, or 2B is obtained by measuring the spectral transmittance of a certain area on the shield pattern for each color formed with colored pattern using the measured value 1R, 1G, or 1B as correction value; and (5) each measured value 2R, 2G, or 2B is regarded as the spectral transmittance of colored pixel of each color. COPYRIGHT: (C)2007,JPO&INPIT
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