| 摘要 |
An irradiation position positioning method of a charged particle beam in a composite charged particle beam apparatus having an ion beam lens barrel, a secondary charged particle and detector, is realized by irradiating a surface of a sample with a first charged particle beam, and irradiating the charged region with a second charged particle beam having a reverse charge, and observing a change in contrast between the charged region irradiated with the first charged particle beam and the charged region irradiated with the second charged particle beam under a microscope to position the second charged particle beam and identify a position irradiated with the second charged particle beam.
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