发明名称 |
DEVICE FOR OPERATING GAS IN VACUUM OR LOW-PRESSURE ENVIRONMENT AND FOR OBSERVATION OF THE OPERATION |
摘要 |
A device for operating gas in the vacuum or low-pressure environment and fo r observation of the operation includes a housing. The housing has a thinner part formed at a side thereof, and at least one spacer mounted therein for partitioning off its inside into a gas chamber and at least one buffer chamber outside the gas chamber. The gas chamber has two inner apertures provided on the spacers above and below the gas chamber. The housing has two outer apertures provided respectively on a top side thereof and a bottom side thereof. All of the inner and outer apertures are coaxial with one another and located on the thinner part. The housing has a pumping port for communication with the buffer chamber, and a gas inlet for communication wit h the gas
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申请公布号 |
CA2545600(A1) |
申请公布日期 |
2006.11.09 |
申请号 |
CA20062545600 |
申请日期 |
2006.05.02 |
申请人 |
LEE, BING-HUAN |
发明人 |
HSIEH, WEN-JIUNN;CHAO, CHIH-YU |
分类号 |
H01J37/26;H01J37/16 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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