| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for uniformly forming a catalyst which accelerates the growth of a carbon film at a high density, and to provide a method of manufacturing the carbon film using the catalyst. SOLUTION: When heat annealing is applied to a substrate 10 on which a catalytic metal film having an action of accelerating the growth of the carbon film is grown, voltage is applied to the substrate from a direct current electric source 32 and the catalytic metal film is turned to fine particles having uniform particle size and distribution density, and when the film-forming of carbon nanotube is performed by thermal CVD using the obtained fine particles of catalytic metal, the film-forming is assisted by applying voltage from the direct current electric source 32 to the substrate 10. COPYRIGHT: (C)2007,JPO&INPIT |
