| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device and method capable of performing high-speed inspection by a thermo-reflectance method. SOLUTION: The measuring device has a confocal optical system having a Nipkow disk 120, radiates laser beams for inspection and heating to a plurality of places of an inspected sample via the confocal optical system, and simultaneously obtains thermophysical property information of the plurality of places based on the reflected lights from the plurality of places of the inspected sample. COPYRIGHT: (C)2007,JPO&INPIT
|
