发明名称 METHOD FOR PRODUCING THIN FILM AND THIN FILM OBTAINED BY THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a three-dimensionally cross-linked polymer thin film having a controlled film thickness and to provide a method for producing the thin film. SOLUTION: The method for producing the thin film comprises a step of preparing a substrate, a step (A) of dipping a substrate in an A solution containing a monomer A having a reactive substituent, reacting the monomer A with the substrate surface and fixing the monomer and a step (B) of dipping the substrate in a B solution containing a monomer B having a reactive substituent, reacting the monomer B with the substrate surface and fixing the monomer. The reactive substituent of the monomer A and the reactive substituent of the monomer B are the reactive substituents for reacting the monomer A with the monomer B and forming a covalent bond. The step (A) and the step (B) are repeated. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006307027(A) 申请公布日期 2006.11.09
申请号 JP20050131764 申请日期 2005.04.28
申请人 HITACHI CHEM CO LTD 发明人 NAKAKO TAKEO
分类号 C08J5/18;B05D1/18;B05D7/24;H01L21/312 主分类号 C08J5/18
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