MULTILAYER FILM MIRROR AND SOFT X-RAY OPTICAL SYSTEM HAVING THE MULTILAYER FILM MIRROR

摘要

PROBLEM TO BE SOLVED: To provide a multilayer film mirror capable of obtaining high reflectivity with the constituting materials of the multilayer film with a combination of the same materials and improving durability, and a soft X-ray optical system having the multilayer film mirror.

SOLUTION: For the multilayer film mirror 2 which repeatedly piling layers (Mo layers 3 and Si layers 4) consisting of different materials with large difference in refractive index in soft X-ray range and refractive index in vacuum, the material of at least either layer of different materials is constituted of a material with a lighter mass of a natural isotope.

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