| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying device capable of holding an upper and a lower surfaces of a substrate in both cross directional ends thereof with an end support roller and an over-placed roller at the same force. SOLUTION: This conveying device is provided with a plurality of conveying shafts 3 arranged with the predetermined interval, while making the axes thereof cross the substrate conveying direction, a plurality of conveying rollers 21 provided in the conveying shafts to support lower surfaces of parts of the substrate except the cross directional both ends, an end support roller 22 for supporting a lower surface of the cross directional both ends of the substrate, a pair of over-placed roller shafts 25 arranged over the one end and the other end of the conveying shaft so that the axes thereof are arranged in parallel with the conveying shaft and supported freely to turn in one end thereof corresponding to both the ends of the conveying shaft, a pair of over-placed rollers 27 provided in the other end of an over-placed roller shaft to push the top surface of cross directional ends of the substrate, and a weight 29 provided in the over-placed roller shaft to adjust pushing force of the over-placed roller for pushing the top surface of the substrate. COPYRIGHT: (C)2007,JPO&INPIT
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