| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus capable of using a low viscous coating material and forming a coating film having several tens to several hundreds nanometer thickness on the surface of a base material regardless of the shape or the length of the base material. SOLUTION: The coating material is provided with a T-shaped tube 1 holding a coating material C inside and for applying the coating material C on the whole surface of a glass substrate S by inserting the glass substrate S into the coating material C, a supply tank 2 for supplying the coating material C to the T-shaped tube 1 through a supply pipe 3, a substrate inserting machines 5, 6 for inserting the glass substrate S into the T-shaped tube 1 without bringing the glass substrate S into contact with the inside surface of the T-shaped tube 1, a temperature controller 7 with thermometer for adjusting the temperature of the coating material C in the T-shaped tube 1, position sensors 8, 9, coating material sensors 11, 12 and a substrate dryer 13. COPYRIGHT: (C)2007,JPO&INPIT
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