发明名称 |
PIEZOELECTRIC VIBRATOR AND ITS MANUFACTURING METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric vibrator by which it is unnecessary to form extra electrodesto to attain a downsizing, the time needed for frequency adjustment can be shortened and also its frequency can accurately be adjusted. <P>SOLUTION: A frequency adjusting stage comprises: roughly adjusting the frequency by irradiating an excitation portion of an electrode with laser light until the difference between a measured frequency and a set frequency to be adjusted to becomes smaller than a designated value (steps ST4 to ST6); and finely adjusting the frequency after the rough adjustment by irradiating a lead-out wire portion of the electrode with laser light (steps ST7 to ST9). <P>COPYRIGHT: (C)2007,JPO&INPIT |
申请公布号 |
JP2006311110(A) |
申请公布日期 |
2006.11.09 |
申请号 |
JP20050130100 |
申请日期 |
2005.04.27 |
申请人 |
FUJITSU MEDIA DEVICE KK |
发明人 |
MATSUI TOMOHIRO;KUBOI HIDEMITSU;MIYAGAWA TAKU;ARAYA KAZUKI |
分类号 |
H03H3/04;H01L41/09;H01L41/18;H01L41/22;H01L41/23;H01L41/253;H01L41/29;H03H9/17 |
主分类号 |
H03H3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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