METHOD FOR FORMING MULTILAYER FILM, OPTICAL COMPONENT, OPTICAL HEAD AND OPTICAL RECORDING/REPRODUCING DEVICE

摘要

PROBLEM TO BE SOLVED: To inexpensively form a multilayer film with desired film thickness at high precision even in the case a general film deposition system is used.

SOLUTION: The method for forming a multilayer film comprises: a first layer film formation stage where a high refractive index film 4a is formed on an optical substrate 2 with the film thickness upon the designing is as the controlled film thickness; and an upper layer film formation stage where, on the formed film, a low refractive index film 5a or 5b and a high refractive index film 4a or 4b are formed with the film thickness in the prescribed ratio of the film thickness upon designing of the low refractive index film 5a or 5b and the high refractive index film 4a or 4b as the controlled film thickness.

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