| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric vibration piece capable of preventing the disconnection of an electrode formed on a step of an inverse mesa type piezoelectric vibration piece. SOLUTION: In the inverse mesa type piezoelectric vibration piece 10, a piezoelectric member 12 is formed so that its thickness in a vibration section 14 is thinner than its thickness at a peripheral edge 16, and an excitation electrode 18 formed at the vibration section 14 is connected to a connection electrode 20 formed on the peripheral edge 16 via lead-out electrodes 22 (22a-22c). For the lead-out electrodes 22, the width of the lead-out electrode 22a arranged on the step between the vibration section 14 and the peripheral edge 16 is made larger than widths of the lead-out electrodes 22b, 22c arranged on a planar portion. COPYRIGHT: (C)2007,JPO&INPIT
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