| 摘要 |
PROBLEM TO BE SOLVED: To assure that a user can effectively narrow the better inspecting condition. SOLUTION: The inspection supporting system sorts each defect detected with an inspection apparatus conforming to a plurality of inspecting conditions in accordance with combinations of the inspecting conditions for detecting respective defects, and calculates for each sorting visual distribution of the inspection objects of the defect belonging to each sorting on the basis of the location information of the defect belonging to the relevant sorting. Consequently, a map indicating each distribution is displayed for each sorting within a map display field 1000 on the map display screen. COPYRIGHT: (C)2007,JPO&INPIT
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