| 摘要 |
PROBLEM TO BE SOLVED: To provide a process tube and its manufacturing method capable of suppressing lateral deformation of a perforated plate and top plate even if repeatedly used under high temperature. SOLUTION: A process tube 100 comprises a cylindrical tube body 1, a top plate 2 fitted to the upper end of the tube body 1, and a perforated plate 3 fitted away from the top plate 2 on the inner side of the tube body 1. The top plate 2 and the perforate plate 3 are dome-shaped. The upper end 5 of the tube body 1, comprising a joint (a) between the top plate 2 and the tube body 1, and a joint (b) between the perforated plate 3 and the tube body 1, is thicker than the parts other than the upper end 5. COPYRIGHT: (C)2007,JPO&INPIT
|
