| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-machine switch which is small in width in a direction orthogonal to a signal line, and which saves on a control voltage for switching on/off and reduces process conditions. SOLUTION: The micro-machine switch according to the present invention controls the switching between conduction and non-conduction of a signal line 2 extending on a substrate 1 by bringing a working electrode 8 close to/apart from the signal line 2. The micro-machine switch comprises: a support section 5 provided on the surface of the substrate 1; a first arm section 7 of cantilever type that protrudes from the support section 5 and extends along the substrate 1 at a distance from the surface of the substrate 1; an upper electrode 4 provided at the end of the first arm section 7; a second arm section 6a that protrudes from the upper electrode 4 and extends along the substrate 1 at a distance from the surface of the substrate 1; the working electrode 8 provided at the end of the second arm section 6a; and a lower electrode 9 provided on the surface of the substrate 1 to be opposed to the upper electrode 4. The direction in which the first arm section 7 protrudes and the direction in which the second arm section 6a protrudes cross over each other at an angle of 90 degrees. COPYRIGHT: (C)2007,JPO&INPIT
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