| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor having satisfactory yields in a manufacturing process and satisfactory productivity and provide its manufacturing method. <P>SOLUTION: The multiaxial acceleration sensor is provided with both a movable substrate 11 for supporting the mass part 12, which is arranged along an X-Y plane in an XYZ coordinate system and displaced according to acceleration, at a surrounding supporting part 13 via a plurality of beam parts 14 and a fixed substrate 15 jointed to the supporting part 13 in the movable substrate 11 and provided on its upper surface with fixed electrodes 16 having prescribed intervals to the mass part 12 in the movable substrate 11. Protrusions 17 are provided at prescribed intervals on the side of the mass part 12 and the beam parts 14 opposite to the fixed electrodes 16, and end parts 18 of the fixed electrodes 16 are exposed from side surfaces of the fixed substrate 15. <P>COPYRIGHT: (C)2007,JPO&INPIT |
