| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem wherein, when high-frequency power is supplied to a load associated with discharge by using a frequency-variable type high-frequency power supply device, an expensive and large automatic matching unit, having mechanical life must be used in order to execute impedance matching during discharge in the load, and it is difficult to reduce the matching time. <P>SOLUTION: A fixed matching box 3 is arranged between this high-frequency power device 1 and a load 5. When discharge is generated in the load 5, a frequency control circuit 11 controls an oscillation circuit 12 so as to oscillate at a predetermined first oscillation frequency f1 through a second oscillation frequency f2 (this f2 is to be used as a reference frequency f0), and then controls the oscillation frequency of the oscillation circuit 12 so as to reduce the reflection coefficient absolute value Γ, by repeating a process for specifying the oscillation frequency minimizing the reflection coefficient absolute value Γ; while changing the oscillation frequency in a predetermined frequency range including the reference frequency f0. <P>COPYRIGHT: (C)2007,JPO&INPIT |
