| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor which is superior in productivity, with high detection accuracy, despite its simple structure. <P>SOLUTION: The angular velocity sensor comprises a tuning fork resonator 10, having multiple arms 11, 12 that extend from a base 13, a single lead frame 20 that supports the base 13, a package 30 that supports the lead frame 20, and the package 30 and lead frame 20 define a space 31 therebetween. The lead frame 20 has a bending part 22 having a cross section of C shape, the part 22 supports the base 13 and the part 22 forms a space 31. Alternatively, the lead frame 20 has a planar part 21 which supports the base 13, and a concave part 31 is formed on the surface of the package 30 which supports the lead frame 20, and the concave part forms the space 31. <P>COPYRIGHT: (C)2007,JPO&INPIT |
